Master of Science in MEMS
Project-Based Learning. Cutting-Edge Research
This three-semester degree is ideal preparation for industry work, a research career or doctoral study.

Program Benefits
- Flexible three-semester study plan
- Innovative course design and research concentrations
- Opportunity for independent study
- Mentorship from world-class faculty
- A track record of excellent career outcomes
Curriculum
- Capstone Experience with project-based learning—3 credits
- 3 Department courses at 500-level or above—9 credits
- 5 Elective courses—15 credits
- 1 Mathematics or Statistical Science course—3 credits
- Research project or thesis—1 credit
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US Air ForceDuke allowed me to choose from dozens of courses to create a curriculum specific to my thesis and interests.
Typical Study Plan
3 Semesters
Category | Fall 1 | Spring 1 | Fall 2 |
---|---|---|---|
Research | Identify Master of Science Project | Independent Study or Elective | Independent Study or Elective |
Concentration | Capstone Experience | Core Course | Core Course |
Math or Stat Course | Core Course | ||
Electives | Elective | Elective | Elective |
4-Semester Option
You may extend to a second spring semester, if necessary, to defend your project or thesis. If you take the option, only 1 credit of tuition is charged.
Capstone Experience
Experiment Design and Research Methods
Define your own hands-on design project. Build technical expertise and professional communication skills—all while assembling a personal digital portfolio your work.
Additional Information
Master’s Contacts
Siobhan Rigby Oca, Director of Master’s Studies
Shauntil Gray, Director of Master’s Studies Assistant